AL 140
AL 140
AL 140
√. For processing of large-scale flat substrates
√. For Flat Panel Display, PCB and solar applications
√. Ideally suited for production, R&D and laboratories
About Product
- Well suit for Plasma surface cleaning treatment.
- No limitation of materials.
- Plasma polymerization to change surfaces from hydrophobic to hydrophilic and vice versa.
- Enhance adhesive force of bonding / welding.
Plasma Source: Microwave 2.45GHz
Microwave Power: Dual-Source, 2*1200W
Chamber Size: W 850 x D 460 x H 350 mm
Chamber Volume: 140L
Process Gas: 3 standard process gas with MFCs
Chamber Door: Drawer type with UV shield viewing port
Operating System: 10.4” touch panel, Window CE based OS
Options:
Vacuum System
Green/ Red/ Yellow Light Tower
Additional Gas Channel