AL 18
AL 18
AL 18
√.Improving Wire Bonding
√.Improving Solder Ball Attach
√.Improving Flip Chip Underfill
√.Improving Molding
About Product
- The Alpha Plasma System AL 18 is ideal for small-volume production, pilot line manufacturing and R&D purposes. Still important, the system will meet the full 360 degrees of today’s requirements in advanced chip packaging.
- The AL 18 system is also featuring the innovative Alpha Plasma design and microwave coupling. The tool is truly versatile. Proven ECR technique is just an example from the wide range of operating modes. The classic rotary table configuration is available as well.
Process chamber: Aluminum
Volume: 18 liters
Chamber size: W 250 mm × D 290 mm × H 250 mm
Chamber door: Hinged – type with viewing port
Microwave power: 2.45 GHz, adjustable between 50 and 600 Watts
Options
Vacuum pump
Gas Channel
Rotary table
ECR set-up
Utilities: 3/N/PE AC 50 Hz 400/240 V 16 A
Dimensions: W 530 mm × D 600 mm × H 550 mm
Weight: 40 kg w/o pump ; approx . 100 kg w/ vacuum pump