Plasma polymerization to change surfaces from hydrophobic to hydrophilic and vice versa.
Enhance adhesive force of bonding/ welding.
Process chamber: Aluminum Volume: 76 liters Chamber size: W 400 mm × D 490 mm × H 400 mm Chamber door: Drawer-type with viewing port Microwave power: 2.45 GHz, adjustable between 50 and 1200 Watts
Options Vacuum pump Gas Channel Rotary table ECR set-up Utilities: 3/N/PE AC 50 Hz 400/240 V 16 A Dimensions: W 770 mm × D 780 mm ×H 780 mm (incl. light tower)
About Us
Alpha Plasma develops and produces world-class, high quality plasma
systems for surface activation, cleaning and coating to the semiconductor and compound industries.
Process chamber: Aluminum
Volume: 76 liters
Chamber size: W 400 mm × D 490 mm × H 400 mm
Chamber door: Drawer-type with viewing port
Microwave power: 2.45 GHz, adjustable between 50 and 1200 Watts
Options
Vacuum pump
Gas Channel
Rotary table
ECR set-up
Utilities: 3/N/PE AC 50 Hz 400/240 V 16 A
Dimensions: W 770 mm × D 780 mm ×H 780 mm (incl. light tower)