The Alpha Plasma System AL 76 Compact is the perfect all-rounder. This microwave plasma cleaner meets the full 360 degrees of today’s requirements in advanced chip packaging.
The innovative system design and microwave coupling makes the AL 76 Compact to the most productive and versatile plasma system. Proven ECR technique is just an example from the wide range of operating modes. The classic rotary table set-up is included also rounding off the system configurations
Process chamber: Aluminum Volume: 76 liters Chamber size: W 400 mm × D 490 mm × H 400 mm Chamber door: Drawer – type with viewing port Microwave power: 2.45 GHz, adjustable between 50 and 1200 Watts
Vacuum pump: vacuum pump combination Gas Channel Rotary table ECR set-up Utilities: 3/N/PE AC 50 Hz 400/240 V 16 A Dimensions: W 1050 mm × D 800 mm × H 2020 mm (incl. light tower)
Alpha Plasma develops and produces world-class, high quality plasma
systems for surface activation, cleaning and coating to the semiconductor and compound industries.