AL 76 Compact

AL 76 Compact

√.Improving Wire Bonding
√.Improving Solder Ball Attach
√.Improving Flip Chip Underfill
√.Improving Molding

About Product

  • The Alpha Plasma System AL 76 Compact is the perfect all-rounder. This microwave plasma cleaner meets the full 360 degrees of today’s requirements in advanced chip packaging.
  • The innovative system design and microwave coupling makes the AL 76 Compact to the most productive and versatile plasma system. Proven ECR technique is just an example from the wide range of operating modes. The classic rotary table set-up is included also rounding off the system configurations

Process chamber: Aluminum
Volume: 76 liters
Chamber size: W 400 mm × D 490 mm × H 400 mm
Chamber door: Drawer – type with viewing port
Microwave power: 2.45 GHz, adjustable between 50 and 1200 Watts


Vacuum pump: vacuum pump combination
Gas Channel
Rotary table
ECR set-up
Utilities: 3/N/PE AC 50 Hz 400/240 V 16 A
Dimensions: W 1050 mm × D 800 mm × H 2020 mm (incl. light tower)