√. Medical √. Flat Pannel Display √. New Energy Battery √. Automobile Making √. Solar Cell √. Rubber/ Plastic/ Metal Pretreatment
Process chamber: Aluminum Volume: 76 liters Chamber size: W 400 mm × D 490 mm × H 400 mm Chamber door: Drawer-type with viewing port Microwave power: 2.45 GHz, adjustable between 50 and 1200 Watts
Options Vacuum pump Gas Channel Rotary table ECR set-up Utilities: 3/N/PE AC 50 Hz 400/240 V 16 A Dimensions: W 770 mm × D 780 mm ×H 780 mm (incl. light tower)
Alpha Plasma develops and produces world-class, high quality plasma
systems for surface activation, cleaning and coating to the semiconductor and compound industries.
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