Q 150

Q 150

√.Advantages of the Microwave frequency of 2.45 GHz.
√.Removal of photo resist after high dose implantation.
√.After or before wet or dry etching
√.SU 8 and other resists based on epoxy process.
√.Sacrificial layers in MEMS fabrication.

About Product

  • The Plasma System series Q prepared for the installation in a cleanroom wall as well as a table top system.The system is suitable for wafers up to 125 mm and designed for semiconductor and microelectronics industry.

Process chamber: Quartz Glass
Volume:6 liters
Chamber size:diameter 150 mm, dept. 260 mm
Microwave power: 2.45 GHz
Vacuum gauge: Pirani, 1 – 1000 Pa
Vacuum system:DN 25 ISO-K
Vacuum valve:Electro-pneumatic valve
Options
Vacuum pump
Gas Channel
Light tower
Utilities:1 connection 3/N/PE  AC 50/60 Hz  400/240 V  16 A
Dimensions:W 500 mm ×D 370 mm × H 550 mm
Weight:40 kg without pump