Q 240
Q 240
About Product
The Plasma System series Q prepared for the installation in a cleanroom wall as well as a table top system. The system is suitable for wafers up to 200 mm and designed for semiconductor and microelectronics industry.
About Us
Alpha Plasma develops and produces world-class, high quality plasma systems for surface activation, cleaning and coating to the semiconductor and compound industries.
Process: chamber Quartz Glass
Volume: 21 liters
Chamber size: diameter 240 mm, dept. 460 mm
Chamber door: aluminum, support rods attached to the door for manual or automatic loading according to the drawer principle, viewing port
Support rods: aluminum, the rods are made by customer requirement
Microwave power: 2.45 GHz, adjustable between 50 and 1200 Watts
Options
Vacuum pump
Gas Channel
Light tower
Process pressure control
Utilities: 1 connection 3/N/PE AC 50/60 Hz 400/240 V 16 A for system and pump
Dimensions: W760 mm × D770 mm × H 775 mm