Q 240

The Plasma System series Q prepared for the installation in a cleanroom wall as well as a table top system. The system is suitable for wafers up to 200 mm and designed for semiconductor and microelectronics industry.

Q 150

  • The Plasma System series Q prepared for the installation in a cleanroom wall as well as a table top system.The system is suitable for wafers up to 125 mm and designed for semiconductor and microelectronics industry.