ASTRO 96

  • Our robust substrate loader and unloader offers to handle the most sensitive substrates with jam free solutions.
  • Our Innovative ASTRO 96 is a strip level plasma equipment with minimum substrates transportation.
  • ASTRO 96 chamber together with our excellent microwave source can accomodate wide leadframes of about 108mm width with good uinformity.
  • Microwave plasma process, which doesnot cause any surface erosion or redeposition.
  • Chemical cleaning for sensitive devices (No sputtering).
  • High throughput Multi Strip processing.Includes a fully automatic strip & magazine handling system.
  • Especially useful for wide strips which are difficult to process in Magazines.
  • Easy & fast conversion bet. Different strips formats. No special tools required.
  • Strip damage is prevented by use of force sensors.

AL 76 Compact

  • The Alpha Plasma System AL 76 Compact is the perfect all-rounder. This microwave plasma cleaner meets the full 360 degrees of today’s requirements in advanced chip packaging.
  • The innovative system design and microwave coupling makes the AL 76 Compact to the most productive and versatile plasma system. Proven ECR technique is just an example from the wide range of operating modes. The classic rotary table set-up is included also rounding off the system configurations

AL 18

  • The Alpha Plasma System AL 18 is ideal for small-volume production, pilot line manufacturing and R&D purposes. Still important, the system will meet the full 360 degrees of today’s requirements in advanced chip packaging.
  • The AL 18 system is also featuring the innovative Alpha Plasma design and microwave coupling. The tool is truly versatile. Proven ECR technique is just an example from the wide range of operating modes. The classic rotary table configuration is available as well.